FPD STAGE
FPD STAGE 4
- Work area: OLED Sealing
- Guide: LM Guide
-
Applicable motor (57-Axis)
- Coreless Type Linear Motor
- Controller: ACS & U-mac
-
Key Features
- - Superior speed stability: Scan motion
- - High rigidity and stable system
- - Ensure high degree of mechanism and control performance
- - Efficient space utilization
- - Anti-vibration design for micro vibration
FPD STAGE 4 Specifications
| Specifications | LEFT | RIGHT | |
|---|---|---|---|
| Straightness | Table Moving Axis | 12㎛ | 15㎛ |
| Cross Axis(X) | 12㎛ | 9㎛ | |
| Gantry Axis(Y) | 7㎛ | 8㎛ | |
| Flatness | Table Moving Axis | 11㎛ | 13㎛ |
| Cross Axis(X) | 8㎛ | 6㎛ | |
| Gantry Axis(Y) | 8㎛ | 7㎛ | |
| Orthogonality | 3.8arc-sec | 3.5arc-sec | |
| Flatness of Table | 35㎛ | 35㎛ | |