FPD STAGE 1

• Work area: Module 46"~57" (Dual Chuck Stage)
• Guide: LM Guide
• Application motor
  • Coreless Type Linear Motor
• Controller: ACS & U-mac
• Key Features
  • - Superior speed stability: Scan motion
  • - High rigidity and stable system
  • - Ensure high degree of mechanism and control
  • - Efficient space utilization
  • - Anti-vibration design for micro vibration