FPD STAGE
FPD STAGE 2
- Work area: 6 ~ 8 Generation
- Guide: LM Guide
-
Application motor
- Coreless Type Linear Motor
- Controller: ACS & U-mac
-
Key Features
- - Ensuring excellent speed stability: P to P
- - High rigidity and stable system
- - Ensure high degree of mechanism and control performance
- - Efficient space utilization
- - Anti-vibration design for micro vibration
FPD STAGE 2 Specifications
| Specifications | X0, X1 : Gantry axis | Y : Cross axis |
|---|---|---|
| Stroke | 2,640㎜ | 2,480㎜ |
| Velocity | 400㎜/s | 500㎜/s |
| Acceleration | >0.2G | >0.4G |
| Accuracy | ± 0.1㎛/FS | ± 0.1㎛/FS |
| Repeatability | ± 0.6㎛ | ± 0.6㎛ |
| Fiatness | ± 10.2㎛/FS | ± 8.2㎛/FS |
| Straightness | ± 5.5㎛/FS | ± 7.0㎛/FS |
| Yaw | ± 5acr-sec | ± 5acr-sec |
| Pitch | ± 5acr-sec | ± 5acr-sec |
| Position stability | <± 0.1㎛ | <± 0.1㎛ |