• Product
  • Precision Moving Stage
  • FPD STAGE

FPD STAGE

FPD STAGE 2

  • Work area: 6 ~ 8 Generation
  • Guide: LM Guide
  • Application motor
    • Coreless Type Linear Motor
  • Controller: ACS & U-mac
  • Key Features
    • - Ensuring excellent speed stability: P to P
    • - High rigidity and stable system
    • - Ensure high degree of mechanism and control performance
    • - Efficient space utilization
    • - Anti-vibration design for micro vibration

FPD STAGE 2 Specifications

Specifications, X0, X1 : Gantry axis, Y : Cross axis 구성된 표
Specifications X0, X1 : Gantry axis Y : Cross axis
Stroke 2,640㎜ 2,480㎜
Velocity 400㎜/s 500㎜/s
Acceleration >0.2G >0.4G
Accuracy ± 0.1㎛/FS ± 0.1㎛/FS
Repeatability ± 0.6㎛ ± 0.6㎛
Fiatness ± 10.2㎛/FS ± 8.2㎛/FS
Straightness ± 5.5㎛/FS ± 7.0㎛/FS
Yaw ± 5acr-sec ± 5acr-sec
Pitch ± 5acr-sec ± 5acr-sec
Position stability <± 0.1㎛ <± 0.1㎛