FPD STAGE
FPD STAGE 3
- Work area: 4 ~ 7.5 Generation
- Guide: LM Guide
-
Application motor
- Coreless Type Linear Motor
- Controller: ACS & U-mac
-
Key Features
- - Superior speed stability: Scan motion
- - High rigidity and stable system
- - Ensure high degree of mechanism and control performance
- - Efficient space utilization
- - Anti-vibration design for micro vibration
FPD STAGE 3 Specifications
| Specifications | X0, X1 : Gantry axis | Y : Cross axis |
|---|---|---|
| Stroke | 2,600㎜ | 2,500㎜ |
| Max. Velocity | 1200㎜/s | 1200㎜/s |
| Max. Acceleration | >0.5G | >0.5G |
| Fiatness | ± 5㎛/FS | ± 10㎛/FS |
| Straightness | ± 6.2㎛/FS | ± 7.5㎛/FS |
| Yaw | ± 2.1acr-sec | ± 11.1acr-sec |
| Pitch | ± 3.7acr-sec | ± 6.7acr-sec |