Ultra Precision Air Bearing Stage
Specifications
| AXIS | Futures | Unite | Measuring Specifications |
|---|---|---|---|
|
Top Ari-Bearing |
Effective stroke | ㎜ | 580 |
| Maximum speed | ㎜ | 580 | |
| ACCelation | ㎨ | 5 | |
| Straightness | ㎛ | ±0.54(450㎜) | |
| Flatness | ㎛ | ±0.54(450㎜) | |
| Positioning accuracy | ㎛ | 0.37(550㎜) | |
| BI-directional repeatability | ㎛ | ±0.15(550㎜) | |
| Pitch error | arcsec | 4.27(540㎜) | |
| Yaw error | arcsec | 0.47(550㎜) | |
|
Bottom LM-GUIDE |
Effective stroke | ㎜ | 470 |
| Maximum speed | ㎜/sec | 600 | |
| ACCelation | ㎨ | 5 | |
| Straightness | ㎛ | ±0.97(450㎜) | |
| Flatness | ㎛ | ±0.80(450㎜) | |
| Positioning accuracy | ㎛ | 0.53(450㎜) | |
| BI-directional repeatability | ㎛ | ±0.47(450㎜) | |
| In-position stability | ㎛ | ||
| arcsec | ㎛ | 8.25(450㎜), 4.87(340㎜) | |
| Yaw arror | arcsec | 2.87(450㎜) | |
| XY | Orthogonality | arcsec | 2.739 |
Precision Motion Stage for FPD/Semiconductor
Bearing Type of Stage: Air Bearing System
Laser Applications
· Laser System: Cutting Head + Scanner System
Ultra Precision Air Bearing Stage Advantage
- Implementation of long travel without decline performance
- Improve a flatness and pitch angle error combine porous Air Bearing Stage and vacuum
- Dynamic yaw and straightness calibration from measurement
- Higher Dynamic Stiffness / High Load Capacity
- Ultra-precision Accuracy and Repeatability
- Application : LCD&OLED Laser process, Memory Repair, Inspection, Micro Machining
Ultra Precision Air Bearing Stage Type
SiC (Silicon Carbide) Ceramic based Motion Stage
Type of Bearing / Scale / Isolation System
- Bearing : Air/Vacuum Combination Air Bearing System
- Scale : Laser Scale
- Isolation System : Active
Ultra Precision Air Bearing Stage Feature
- SiC Ceramic Based Stage
- Air-vacuum combination Air-bearing system
- Bf1 Laser Scale , Active isolation system
| Net travel range | > step axis : 500㎜ |
|---|---|
| > step axis : 400㎜ | |
| Max continuous velocity(rate payload) | 400㎜/s |
| Max acceleration(rate payload) | 1.0G |
| Straighness & Flatness, Scan axis | ± 0.1㎛ @ 10㎜ |
| ± 0.5㎛ @ 310㎜ | |
| Position accuracy | ± 0.5㎛ @ 310㎜ |
| BI-directional repeatability(long) | ± 0.1㎛ @ 310㎜ |
| Pich, Roll & Yaw | 2 arc-sec |
| Orthogonality | 1 arc-sec |
| Rated payload | > 15kg, scan axis |
| First natural frequency | > 310Hz |
| In-position stability(on-air) | <± 40㎜ |
| Move profile information | Step move of 4.5㎜ |
| Time to make 4.5㎜ step = 0.11sec | |
| Scan at constant velocity over 300㎜ |