Vacuum chuck
Tri-N has compounding and manufacturing capacity for Porous Ceramic.
- Resistance-Control Porous Ceramic Manufacturing Technology
- Resistance-Control Porous Ceramic Vacuum Chuck Manufacturing Technology
- Part Manufacturing Technology using Ceramics
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Anti-Static Porous Ceramics (Patent 10-1692219)
- It can be applied to Air Bearings, Ceramic Chucks and Air Floating Systems for FPD and Semiconductor by controlling Pore Size (1~20 ㎛) and Porosity (10~48%)
- Ceramic Air Bearing and Ceramic Chuck
- Homogeneous Pore Distribution enables High-Precision Floating and Chucking
- Vibration on Precision Floating: less than 5 ㎛
- No Particle Issue (due to High Temp. Sintering Process)
FPD Antistatic Ceramic Vacuum Chuck application example
Semi Conductor Ceramic Chuck Application
